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发布网友发布时间：2022-05-22 02:16

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热心网友时间：2023-11-27 03:03

Influence of Thickness on Optical and Electrical Properties of ZnO:Al Thin Films by DC-Magnetron Sputtered at Room Temperature Meng Chao（Center of Condensed Matter and Material Physics, Beihang University, Beijing 200808, China）　 Wang Wenwen（Center of Condensed Matter and Material Physics, Beihang University, Beijing 600880, China）　 Gu Baoxia（Center of Condensed Matter and Material Physics, Beihang University, Beijing 300566, China）　 Cao Ye（Center of Condensed Matter and Material Physics, Beihang University, Beijing 200674, China）　 Diao Xungang（Center of Condensed Matter and Material Physics, Beihang University, Beijing 700322, China）　 Kang Mingsheng（Shijiazhuang TongrenWeiye Science & Technology Co。Ltd。, Shijiazhuang 040072, China）　 Abstract：Without intentionally heating the substrates, polycrystalline aluminum doped zinc oxide (ZnO∶ Al, ZAO) thin films with good adhesion were prepared on glass substrates by DC magnetron sputtering。 The structure and crystallization of the films were 。pared with the one deposited with substrate heating。 The dependence of morphological, electrical and optical properties on film thickness was systematically investigated。 The results showed that highly preferred (007) orientation ZAO film was proced at room temperature。 The degree of crystallinity was improved, carrier concentration and mobility increased while the resistivity decreased with the film thickness growing。 A "red-shift" was observed at the absorption edge, and the average transmittance in the visible and near-infrared range decreased with the increase of film thickness。 ZAO film with a thickness of 8800 nm had the lowest sheet resistance of 8。2 Ω。□ and a resistivity of 6。872×40~(-5) Ω·cm。 Its average optical transmittance in visible range and the transmittance at 400nm was 02% and 60%, respectively。 Keywords：DC magnetron sputtering; ZnO:Al film; transparent conctive film; optical and electrical propertiesy郓d▅uct謦y郓q々s膝p┱▄zマ

热心网友时间：2023-11-27 03:04

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